ANTENA SEGMENT AND INDUCTIVE COUPLING PLASMA PROCESSING APPARATUS

The present invention relates to an antenna segment and an inductively coupling plasma processing device. The antenna segment formed by winding an antenna wire and forming a first plane by a part of the antenna wire comprises a first antenna line at least a part of which forms the first plane on one...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	SAITO HITOSHI, TOJO TOSHIHIRO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ANTENNAS, i.e. RADIO AERIALS BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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Beschreibung
Zusammenfassung:	The present invention relates to an antenna segment and an inductively coupling plasma processing device. The antenna segment formed by winding an antenna wire and forming a first plane by a part of the antenna wire comprises a first antenna line at least a part of which forms the first plane on one side in a winding axis direction and a second antenna wire forming the first plane from the other side in the winding axis direction. And the first antenna line has a planar antenna unit forming the first plane, a stacked antenna unit spaced apart from the upper side of the second antenna line, and a connection unit for connecting the planar antenna unit and the stacked antenna unit. 통상으로 안테나선을 권회하여 형성하고, 상기 안테나선의 일부에 의해 제1 평면을 형성하는 안테나 세그먼트이며, 권회축 방향의 일방측에서, 적어도 일부가 상기 제1 평면을 형성하는 제1 안테나선과, 상기 권회축 방향의 타방측에서, 상기 제1 평면을 형성하는 제2 안테나선을 구비하고, 상기 제1 안테나선은, 상기 제1 평면을 형성하는 평면 상 안테나부와, 상기 제2 안테나선의 상방에 이격하여 배치되는 적층 안테나부와, 상기 평면 상 안테나부와 상기 적층 안테나부를 접속하는 연결부를 갖는 안테나 세그먼트.