PIEZO VOLTIC PROBE STATION TIP

The present invention relates to a piezoelectric element probe station probe. By adding a piezoelectric element (1) and an electrode capable of receiving an electrical signal of the piezoelectric element (1) to a probe station probe in the form of a cantilever, the piezoelectric element probe statio...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	YOON, TAE GEUN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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