Laser processing apparatus and laser processing method

An objective of the present invention is to allow a focus of a laser irradiation system to be changed at high-speed, and to enable high-quality and high-efficiency processing. In a laser processing device for processing by irradiating the laser pulse to a workpiece by being configured with a laser o...

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Bibliographische Detailangaben
1. Verfasser: YUKI SAEKI
Format: Patent
Sprache:eng ; kor
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