System and Method for Testing Semiconductor

The present invention is a technique related to a semiconductor test system and a method. The semiconductor test system includes: a transfer chamber; at least one load lock chamber arranged around the transfer chamber and accommodating a plurality of wafers; and at least one test chamber arranged ar...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	KIM GYUNG JIN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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