MASK FOR OLED

Embodiments of the present invention relate to a mask structure applicable to the deposition process of an organic light emitting device, and relate to a deposition mask which implements the structure of a deposition groove passing through a substrate with a structure of a first groove and a second...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIM JEONG RYONG, ROH GEON HO, PARK JAE SEOK, LEE SANG BEUM, CHO SU HYEON, SON HYO WON, HAN TAE HOON
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:Embodiments of the present invention relate to a mask structure applicable to the deposition process of an organic light emitting device, and relate to a deposition mask which implements the structure of a deposition groove passing through a substrate with a structure of a first groove and a second groove having different widths, and has a structure capable of implementing uniform and reliable deposition by minimizing a dead space in which deposition is not performed. The ratio of the depth (a) of the first groove to the thickness (c) of the substrate is 1: (3 to 30). 본 발명의 실시예들은 유기발광소자 등의 증착공정에 적용가능한 마스크 구조에 대한 것으로, 기재를 관통하는 증착용 홈의 구조를 폭이 상이한 제1홈과 제2홈의 구조로 구현하되, 증착이 이루어지지 않는 부분(dead space)을 최소화하여 균일도와 신뢰도 높은 증착을 구현할 수 있는 구조를 구비하는 증착용 마스크에 대한 것이다.