WAFER EXPANDING DEVICE
Disclosed is a wafer expanding device which comprises a wafer expanding ring, a mounting frame, a wafer expanding member and a fixing means. The wafer expanding ring includes an external frame and an adhesive film, wherein the adhesive film is connected to the external frame to make a wafer attached...
Gespeichert in:
Hauptverfasser: | , , , , , |
---|---|
Format: | Patent |
Sprache: | eng ; kor |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | Disclosed is a wafer expanding device which comprises a wafer expanding ring, a mounting frame, a wafer expanding member and a fixing means. The wafer expanding ring includes an external frame and an adhesive film, wherein the adhesive film is connected to the external frame to make a wafer attached. The mounting frame is the frame where the wafer expanding ring is mounted. The wafer expanding member pushes and expands the adhesive film and includes push rollers having different sizes or having different distances to the center of the wafer. The fixing means fixes the external frame of the wafer expanding ring along with the mounting frame and when the wafer expanding member pushes the adhesive film upward, the adhesive film gets larger to expand the wafer. According to the present invention, a force applying member for applying force to the adhesive film is provided in order to change partial tension of the adhesive film. Therefore, provided is a wafer expanding device which changes the tension of the adhesive film attached to the bottom of the wafer, thereby expanding the wafer.
웨이퍼 확장 장치에 있어서, 웨이퍼 확장 링, 탑재대, 웨이퍼 확장 부재 및 고정 수단을 포함한다. 웨이퍼 확장 링은 외부 프레임 및 접착 필름을 포함하고, 접착 필름은 외부 프레임에 연결되어 웨이퍼가 부착되도록 한다. 탑재대는 웨이퍼 확장 링을 탑재한다. 웨이퍼 확장 부재는 접착 필름을 푸시하여 확장시키고, 웨이퍼 확장 부재는 상이한 크기의 푸시 롤러를 포함하거나, 웨이퍼 중심까지 거리가 다른 푸시 롤러를 포함한다. 고정 수단은 탑재대와 동시에 웨이퍼 확장 링의 외부 프레임을 고정시키고, 웨이퍼 확장 부재가 접착 필름을 위로 푸시하면, 접착 필름이 확장되면서 웨이퍼를 확장시킨다. 본 발명은 접착 필름의 부분 장력을 변경시키도록, 접착 필름에 힘을 인가하는 힘 인가 부재를 더 제공한다. |
---|