COMPOSITION FOR FORMING SILICA LAYER SILICA LAYER AND ELECTRONIC DEVICE

The present invention relates to a composition for forming a silica film, including a silicon-containing polymer and a solvent. Provided is a composition for forming a silica film, wherein the silicon-containing polymer has a weight average molecular weight (Mw1) of 1,000 to 20,000, the silicon-cont...

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Bibliographische Detailangaben
Hauptverfasser: SAKONG JUN, JANG JUNYOUNG, NOH KUNBAE, BAE JIN HEE, KWAK TAEKSOO, HWANG BYEONG GYU
Format: Patent
Sprache:eng ; kor
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Zusammenfassung:The present invention relates to a composition for forming a silica film, including a silicon-containing polymer and a solvent. Provided is a composition for forming a silica film, wherein the silicon-containing polymer has a weight average molecular weight (Mw1) of 1,000 to 20,000, the silicon-containing polymer has a polar polymer molecular weight (Mw2) of 50,000 to 200,000 detected when measured by a multi-angle light scattering detector (MALS), and the polar polymer has a peak area of 3% or less with respect to the silicon-containing polymer when measured by the multi-angle light scattering detector (MALS). 규소 함유 중합체 및 용매를 포함하는 실리카 막 형성용 조성물로서, 상기 규소 함유 중합체의 중량평균분자량(Mw1)은 1,000 내지 20,000이고, 상기 규소 함유 중합체는 다각도 광산란 검출기(MALS) 측정시 검출되는 극 고분자의 분자량(Mw2)이 50,000 내지 200,000이고, 상기 극 고분자는 다각도 광산란 검출기(MALS) 측정시 상기 규소 함유 중합체에 대하여 3% 이하의 피크 면적을 가지는 실리카 막 형성용 조성물을 제공한다.