ASSEMBLY FOR SUPPORTING SUBSTRATE AND APPARATUS FOR PROCESSING SUBSTRATE

According to an embodiment of the present invention, provided is a substrate support assembly which can stably support a substrate. The substrate support assembly comprises: a frame having one or more insertion holes recessed from one surface, wherein the insertion hole has an inner flow hole and a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LEE SANG DON, SON SUNG GYUN, KIM JAE WOO, KIM YONG KI, SHIN YANG SIK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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