METHODS AND DEVICES RELATED TO RADIO FREQUENCY DEVICES

METHODS AND DEVICES RELATED TO RADIO FREQUENCY DEVICES

A method and a device related to a radio frequency (RF) device are described. In device manufacturing, the RF device is formed on a first surface of a semiconductor substrate, and a second surface is thinned and then processed. 무선 주파수 장치와 관련된 방법 및 장치 RF 장치와 관련된 방법 및 장치에 대해 설명한다. 장치 제조에 있어서, RF 장치가 반...

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Bibliographische Detailangaben
Hauptverfasser: HEISS DOMINIK, CATTANEO ANDREA, KADOW CHRISTOPH, SOLOMKO VALENTYN, TADDIKEN HANS, BUTSCHKOW CHRISTIAN, FEICK HENNING, STELTENPOHL ANTON, SEIDEL UWE
Format: Patent
Sprache:eng ; kor
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A method and a device related to a radio frequency (RF) device are described. In device manufacturing, the RF device is formed on a first surface of a semiconductor substrate, and a second surface is thinned and then processed. 무선 주파수 장치와 관련된 방법 및 장치 RF 장치와 관련된 방법 및 장치에 대해 설명한다. 장치 제조에 있어서, RF 장치가 반도체 기판의 제1 면에 형성되고, 제2 면이 시닝된 후 처리된다.