LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD

According to the present invention, the number of components of a treatment liquid supply unit of a liquid treatment apparatus can be reduced. The liquid treatment apparatus includes a tank, a circulation passage, a pump, a plurality of liquid treatment parts and a plurality of supply passages. The...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ITAHASHI TAKUYA, WAKAYAMA SHOTA, HORIGUCHI RYOICHI, OJIMA TOMOAKI, NOBUKUNI CHIKARA
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES SEPARATION TRANSPORTING
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