Cleaning apparatus for stage

The present invention relates to a cleaning apparatus for a construction stage. According to the present invention, the cleaning apparatus includes: a stage positioned on a rail to transfer a substrate; and a cleaning part including a first roller positioned above the stage and including a first adh...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	SUNG YONG JAE, YOON HYUN JUNG
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PERFORMING OPERATIONS PHYSICS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORTING
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Beschreibung
Zusammenfassung:	The present invention relates to a cleaning apparatus for a construction stage. According to the present invention, the cleaning apparatus includes: a stage positioned on a rail to transfer a substrate; and a cleaning part including a first roller positioned above the stage and including a first adhesive layer formed to contact foreign substances positioned on the upper surface of the stage to remove the foreign substances, a second roller including a second adhesive layer formed to contact the first adhesive layer to remove foreign substances located on the first adhesive layer, thereby efficiently cleaning the stage for transferring the substrate in a process of cleaning the substrate. 본 발명은 건축용 스테이지 클리닝 장치에 관한 것이다. 본 발명에 따르면 레일 상부에 위치하여 기판을 이송시키는 스테이지, 상기 스테이지 상부에 위치하며 상기 스테이지 상부면에 위치하는 이물질과 접촉되도록 형성되어 이물질을 제거하는 제1 점착층을 포함하는 제1 롤러, 상기 제1 점착층과 접하도록 형성되어 상기 제1 점착층에 위치하는 이물질을 제거하는 제2 점착층을 포함하는 제2 롤러를 구비하는 클리닝부를 포함한다.