EJECTION MATERIAL EJECTING DEVICE AND IMPRINT APPARATUS

The present invention relates to a discharge material discharge device comprising: a discharge unit including a discharge port configured to discharge a discharge material; an electrical substrate configured to control discharge of the discharge material; a first flexible cable connected to the disc...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KURI MASAHIRO, HASEGAWA NORIYASU
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:The present invention relates to a discharge material discharge device comprising: a discharge unit including a discharge port configured to discharge a discharge material; an electrical substrate configured to control discharge of the discharge material; a first flexible cable connected to the discharge unit; a second flexible cable connected to the electrical substrate; and a bonding unit to which the first flexible cable and the second flexible cable are bonded by an anisotropic conductive film, wherein the bonding unit is covered with a sealing material resistant to the discharge material. 토출재 토출 장치는, 토출재를 토출하도록 구성되는 토출구를 포함하는 토출 유닛; 토출재의 토출을 제어하도록 구성되는 전기 기판; 토출 유닛에 접속되는 제1 가요성 케이블; 전기 기판에 접속되는 제2 가요성 케이블; 및 제1 가요성 케이블 및 제2 가요성 케이블이 이방성 도전 필름에 의해 접합되는 접합부를 포함하며, 접합부는 토출재에 내성이 있는 밀봉재로 피복된다.