PROBE STATION APPARATUS WITH IMPROVED SPATIAL RESOLUTION

The probe station apparatus with the improved spatial resolution according to the disclosed present invention includes: a photographing unit photographing a target; and a lens unit positioned between the target and the photographing unit and improving the resolution of the target photographed by the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	KIM SANG SIG, LEE JONGGOO, YANG SEUNG GEN, CHO KYOUNG AH, PARK YOON BEOM
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	The probe station apparatus with the improved spatial resolution according to the disclosed present invention includes: a photographing unit photographing a target; and a lens unit positioned between the target and the photographing unit and improving the resolution of the target photographed by the photographing unit. The lens unit includes an immersion lens. According to this configuration, the spatial resolution in detection of thermal and electrical characteristics of the target is improved, and it is also effective in detecting characteristics of the target within several micrometers. 개시된 본 발명에 의한 공간 분해능이 향상된 프로브 스테이션장치는, 대상체를 촬영하는 촬영부 및 대상체와 촬영부 사이에 위치하여 촬영부에 의해 촬영되는 대상체의 분해능을 향상시키는 렌즈부를 포함하며, 렌즈부는 침지렌즈를 포함한다. 이러한 구성에 의하면, 대상체의 열적 및 전기적 특성 검측의 공간 분해능이 향상되어, 수 마이크로 이내의 대상체의 특성 검출에도 효과적이다.