CONTROL APPARATUS EXPOSURE APPARATUS AND MANUFACTURING METHOD FOR ARTICLE

Provided is a control apparatus with which driving of a driving unit can be controlled with high accuracy with a simple configuration. According to the present invention, the control apparatus (100) comprises: a plurality of current supply sources (20) configured to individually supply a current bas...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	MOTEGI TAKESHI
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORSOR DYNAMO-ELECTRIC CONVERTERS CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRICITY ELECTROGRAPHY GENERATION HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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