FLEXIBLE SUBSTRATE AND MANUFACTURING METHOD THEREOF

The present invention relates to a flexible substrate and a method of manufacturing the same. The method of manufacturing a flexible substrate according to an exemplary embodiment includes: a step of placing a flexible substrate on a substrate holder in a chamber; a step of forming a planarization l...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PARK JEONG SIK, KO KWANG MAN, CHO SEUNG HYUN, KEUM MIN JONG
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:The present invention relates to a flexible substrate and a method of manufacturing the same. The method of manufacturing a flexible substrate according to an exemplary embodiment includes: a step of placing a flexible substrate on a substrate holder in a chamber; a step of forming a planarization layer by performing a deposition process on the flexible substrate; and a step of attaching a functional film on the planarization layer, wherein the step of forming the planarization layer can perform an etching process. 일 실시 예에 의한 플렉서블 기판의 제조 방법은, 챔버 내부의 기판 안치대에 유연 기판을 안치하는 단계; 상기 유연 기판 상에 증착 공정을 수행하여 평탄화층을 형성하는 단계; 및 상기 평탄화층 상에 기능성 필름을 부착하는 단계;를 포함하고, 상기 평탄화층을 형성하는 단계는 식각 공정을 수행할 수 있다.