APPARATUS AND METHOD FOR OBSERVING SPECIMEN

The present invention suggests a device and a method for observing a specimen. The device comprises: a column unit disposed to face a support unit capable of supporting a specimen and having one side opened toward the support unit; a charged particle generation unit installed inside the column unit;...

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Bibliographische Detailangaben
Hauptverfasser:	SONG EUN BEOM, YE SE HUI, SEONG MYUNG JUN, YOON SO YOUNG
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	The present invention suggests a device and a method for observing a specimen. The device comprises: a column unit disposed to face a support unit capable of supporting a specimen and having one side opened toward the support unit; a charged particle generation unit installed inside the column unit; and a cover unit coupled to the opening of the column unit and having an aperture through which charged particles and secondary particles may pass. When observing a specimen under atmospheric pressure using the charged particles, the device and the method may increase resolution of a specimen image by reducing a loss of the charged particles and the secondary particles. 본 발명은, 시료를 지지할 수 있는 지지부와 마주보도록 배치되고, 지지부를 향하는 일측이 개구된 컬럼부, 컬럼부의 내부에 설치되는 하전 입자 발생부, 및 컬럼부의 개구와 결합되고, 하전 입자 및 2차 입자를 통과시킬 수 있는 어퍼처를 구비하는 커버부를 포함하는 시료 관찰 장치, 및 이를 이용한 시료 관찰 방법으로서, 하전 입자를 이용하여 대기압 중의 시료를 관찰할 때, 하전 입자 및 2차 입자의 손실을 줄여서 시료 이미지의 해상력을 높일 수 있는 시료 관찰 장치 및 방법이 제시된다.