PELLICLE AND METHOD FOR PRODUCING THE SAME

An objective of the present invention is to provide a pellicle in which strength of a pellicle film is improved, and a vibration of the pellicle film due to a high-speed scanning operation during exposure is reduced so as to suppress deterioration of overlay. According to the present invention, the...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	NISHIMURA AKINORI
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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