Apparatus for picking up semiconductor devices and method of controlling operations of the same

Disclosed are a semiconductor device pickup apparatus and an operation control method thereof. The apparatus comprises: a vacuum picker for picking up a semiconductor device; a vertical driving unit for moving the vacuum picker in a vertical direction; a load sensor disposed at the lower part of the...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: LEE BYOUNG YUN, SIM JUN HUI, YOON JONG GUEN
Format: Patent
Sprache:eng ; kor
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!