METHOD FOR CENTERING SUBSTRATE

Provided is a method for correcting a position of a rectangular substrate, by using a transport robot which includes a robot arm for gripping the substrate and a first sensor and a second sensor which are provided to face on the transport path, in a process of moving the substrate to a set position...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SON DUKHYUN, JANG SUNGWON
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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