DUAL-STRUCTURE CRUCIBLE AND SOURCE FOR DEPOSITION COMPRISING THE SAME

The present invention discloses a crucible having a double structure capable of accommodating a deposition material, and a deposition source comprising the same. The crucible having the double structure according to the present invention includes: a first body wherein the upper side is open; and a s...

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Bibliographische Detailangaben
Hauptverfasser:	SEO HYUN, YOUN YOUNG SIK, HONG YE WON, JONGMO KOO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The present invention discloses a crucible having a double structure capable of accommodating a deposition material, and a deposition source comprising the same. The crucible having the double structure according to the present invention includes: a first body wherein the upper side is open; and a second body which is drawn inside the first body and disposed at a predetermined position and wherein the upper side and the lower side are open. 본 발명은 증착 물질을 수용할 수 있는 이중 구조를 갖는 도가니 및 이를 포함하는 증착원을 개시한다. 본 발명에 따른 이중 구조를 갖는 도가니는 상부가 개방된 제1 바디, 및 제1 바디 내측에 인입되어 기 설정된 위치에 배치되며 상부 및 하부가 개방된 제2 바디를 포함한다.