POLISHING SLURRY COMPOSITION

The present invention relates to a polishing slurry composition that realizes a high polishing rate and selectivity. In detail, the polishing slurry composition includes an abrasive particle; pyrrolidone to which a hydrophilic group is bound; dispersant; a first dishing inhibitor including polyacryl...

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Bibliographische Detailangaben
Hauptverfasser: CHO HYUN HEE, RYU HYE RIM, SEO KANG KUK
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:The present invention relates to a polishing slurry composition that realizes a high polishing rate and selectivity. In detail, the polishing slurry composition includes an abrasive particle; pyrrolidone to which a hydrophilic group is bound; dispersant; a first dishing inhibitor including polyacrylic acid; and a second dishing inhibitor including a nonionic polymer, wherein the abrasive particle includes a secondary particle including a primary particle, the particle diameter ratio of the primary particle and the secondary particle is 1:3 to 1:500, the specific surface area of the primary particles is 5 to 70 m^2/g, the specific surface area of the secondary particles is 50 to 180 m^2/g, and the secondary particle is formed by self-assembly of the primary particles. 본 발명은 연마용 슬러리 조성물에 관한 것으로서, 더욱 자세하게는, 연마 입자; 친수성기가 결합된 피롤리돈; 분산제; 폴리아크릴산을 포함하는 제1 디싱 억제제; 및 비이온성 고분자를 포함하는 제2 디싱 억제제를 포함하고, 상기 연마 입자는, 1차 입자를 포함하는 2차 입자를 포함하고, 상기 1차 입자 : 2차 입자의 입경비는 1 : 3 내지 1 : 500이고, 상기 1차 입자의 비표면적은 5 m/g 내지 70 m/g이고, 상기 2차 입자의 비표면적은 50 m/g 내지 180 m/g 인 것이며, 상기 2차 입자는 상기 1차 입자들이 자가 조립하여 형성되는 것인, 연마용 슬러리 조성물에 관한 것이다.