VAPORIZATION METHOD FOR A Ga2O3 POWDER AND MANUFACTURING FOR A Ga2O3 NANO-POWDER USING THE SAME
The present invention relates to a vaporization apparatus and a manufacturing method for manufacturing a gallium oxide nanopowder. It is possible to manufacture the gallium oxide nanopowder by heating and vaporizing a solid phase metal gallium and then oxidizing, cooling, and crystallizing the same...
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| Format: | Patent |
| Sprache: | eng ; kor |
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| Zusammenfassung: | The present invention relates to a vaporization apparatus and a manufacturing method for manufacturing a gallium oxide nanopowder. It is possible to manufacture the gallium oxide nanopowder by heating and vaporizing a solid phase metal gallium and then oxidizing, cooling, and crystallizing the same with oxygen and air. The manufactured gallium oxide nanopowder has a small size, little cohesiveness, a round shape particle form, and excellent crystallinity.
본 발명은 산화갈륨 나노 분말 제조를 위한 기화 장치 및 제조방법에 관한 것으로 고상의 금속 갈륨을 가열하여 기화시킨 후 산소 및 공기로 산화, 냉각, 결정화를 시켜 산화갈륨 나노 분말로 제조할 수 있음을 보였으며, 제조된 산화갈륨 나노 분말은 크기가 작고, 응집성이 거의 없고, 입형이 둥글며, 결정성이 뛰어난 특징이 있다. |
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