Method of picking up semiconductor device and apparatus for performing the same

Disclosed are a method for picking up a semiconductor device and an apparatus for performing the same. A vacuum picker for vacuum-adsorbing the semiconductor device descends toward the semiconductor device from a first height via a preset second height. A control unit can monitor a driving current o...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PARK JONG SUNG, HONG EUI CHEOL, YOON JONG GUEN
Format: Patent
Sprache:eng ; kor
Schlagworte:
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