Dry type cleaning apparatus for deposition mask through sublimation and method for the same
The present invention is to provide a method and an apparatus for cleaning a deposition mask used in production of an organic light emitting display device at low costs without the concernment for environmental pollution. To this end, provided is a dry cleaning apparatus (1000) for a deposition mask...
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| creator | KIM, JEA MIN |
| description | The present invention is to provide a method and an apparatus for cleaning a deposition mask used in production of an organic light emitting display device at low costs without the concernment for environmental pollution. To this end, provided is a dry cleaning apparatus (1000) for a deposition mask through sublimation, comprising: a sublimation cleaning pipe (80) using a sublimation purification pipe used for sublimation purification; a sublimation heater (500) installed around the sublimation cleaning pipe (80); and a support (90) which is arranged inside the sublimation cleaning pipe (80) to correspond to the sublimation heater (500) and on which a deposition mask (10) with an organic material (14) deposited thereon is placed.
본 발명은 승화정제에 사용되는 관인 승화정제관이 사용되는 것인 승화세정관(80)과; 상기 승화세정관(80)의 주위에 설치된 승화용 히터(500)와; 상기 승화세정관(80)의 내부에서 상기 승화용 히터(500)에 대응된 위치에 배치되는 것으로서, 유기물질(14)이 퇴적된 증착마스크(10)가 놓이는 지지대(90)를 포함하여 이루어진 것을 특징으로 하는 승화를 통한 증착마스크의 건식세정장치(1000)를 제공한다. |
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본 발명은 승화정제에 사용되는 관인 승화정제관이 사용되는 것인 승화세정관(80)과; 상기 승화세정관(80)의 주위에 설치된 승화용 히터(500)와; 상기 승화세정관(80)의 내부에서 상기 승화용 히터(500)에 대응된 위치에 배치되는 것으로서, 유기물질(14)이 퇴적된 증착마스크(10)가 놓이는 지지대(90)를 포함하여 이루어진 것을 특징으로 하는 승화를 통한 증착마스크의 건식세정장치(1000)를 제공한다.</description><language>eng ; kor</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; CLEANING OR DEGREASING OF METALLIC MATERIAL BY CHEMICALMETHODS OTHER THAN ELECTROLYSIS ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; ELECTRICITY ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2020</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20200507&DB=EPODOC&CC=KR&NR=20200046347A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76318</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20200507&DB=EPODOC&CC=KR&NR=20200046347A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>KIM, JEA MIN</creatorcontrib><title>Dry type cleaning apparatus for deposition mask through sublimation and method for the same</title><description>The present invention is to provide a method and an apparatus for cleaning a deposition mask used in production of an organic light emitting display device at low costs without the concernment for environmental pollution. To this end, provided is a dry cleaning apparatus (1000) for a deposition mask through sublimation, comprising: a sublimation cleaning pipe (80) using a sublimation purification pipe used for sublimation purification; a sublimation heater (500) installed around the sublimation cleaning pipe (80); and a support (90) which is arranged inside the sublimation cleaning pipe (80) to correspond to the sublimation heater (500) and on which a deposition mask (10) with an organic material (14) deposited thereon is placed.
본 발명은 승화정제에 사용되는 관인 승화정제관이 사용되는 것인 승화세정관(80)과; 상기 승화세정관(80)의 주위에 설치된 승화용 히터(500)와; 상기 승화세정관(80)의 내부에서 상기 승화용 히터(500)에 대응된 위치에 배치되는 것으로서, 유기물질(14)이 퇴적된 증착마스크(10)가 놓이는 지지대(90)를 포함하여 이루어진 것을 특징으로 하는 승화를 통한 증착마스크의 건식세정장치(1000)를 제공한다.</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>CLEANING OR DEGREASING OF METALLIC MATERIAL BY CHEMICALMETHODS OTHER THAN ELECTROLYSIS</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>ELECTRICITY</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2020</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjLsKwkAQRdNYiPoPA9bCkgStgw8EO7GzCGMyyS7ui53ZIn-vBD_A6hbnnLssnqc0gUyRoLOE3vgRMEZMKJlhCAl6ioGNmODBIb9BdAp51MD5ZY3DGaDvwZHo0M-JaAJGR-tiMaBl2vx2VWwv58fxuvtetsQRO_Ik7e1eqlIpVe-r-tBU_1kfe7Y8dA</recordid><startdate>20200507</startdate><enddate>20200507</enddate><creator>KIM, JEA MIN</creator><scope>EVB</scope></search><sort><creationdate>20200507</creationdate><title>Dry type cleaning apparatus for deposition mask through sublimation and method for the same</title><author>KIM, JEA MIN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR20200046347A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; kor</language><creationdate>2020</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>CLEANING OR DEGREASING OF METALLIC MATERIAL BY CHEMICALMETHODS OTHER THAN ELECTROLYSIS</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>ELECTRICITY</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>KIM, JEA MIN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>KIM, JEA MIN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Dry type cleaning apparatus for deposition mask through sublimation and method for the same</title><date>2020-05-07</date><risdate>2020</risdate><abstract>The present invention is to provide a method and an apparatus for cleaning a deposition mask used in production of an organic light emitting display device at low costs without the concernment for environmental pollution. To this end, provided is a dry cleaning apparatus (1000) for a deposition mask through sublimation, comprising: a sublimation cleaning pipe (80) using a sublimation purification pipe used for sublimation purification; a sublimation heater (500) installed around the sublimation cleaning pipe (80); and a support (90) which is arranged inside the sublimation cleaning pipe (80) to correspond to the sublimation heater (500) and on which a deposition mask (10) with an organic material (14) deposited thereon is placed.
본 발명은 승화정제에 사용되는 관인 승화정제관이 사용되는 것인 승화세정관(80)과; 상기 승화세정관(80)의 주위에 설치된 승화용 히터(500)와; 상기 승화세정관(80)의 내부에서 상기 승화용 히터(500)에 대응된 위치에 배치되는 것으로서, 유기물질(14)이 퇴적된 증착마스크(10)가 놓이는 지지대(90)를 포함하여 이루어진 것을 특징으로 하는 승화를 통한 증착마스크의 건식세정장치(1000)를 제공한다.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY CLEANING OR DEGREASING OF METALLIC MATERIAL BY CHEMICALMETHODS OTHER THAN ELECTROLYSIS COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Dry type cleaning apparatus for deposition mask through sublimation and method for the same |
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