DUAL BACK-PLATE AND DIAPHRAGM MICROPHONE

The present invention provides a micro-electromechanical system (MEMS) microphone. The MEMS microphone comprises a substrate having an opening, a first diaphragm, a first backplate, a second diaphragm, and a second backplate. The first diaphragm faces the opening in the substrate. The first backplat...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHU CHIA HUA, CHENG CHUN WEN, LO WEN TUAN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PUBLIC ADDRESS SYSTEMS TRANSPORTING
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