POLISHING SLURRY COMPOSITION

The present invention relates to a polishing slurry composition capable of stably maintaining dispersion stability and, more specifically, to a polishing slurry composition comprising: abrasive particles; a dispersant; a stabilizer; and a polishing selectivity adjusting agent, wherein the dispersant...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: JANG HYUN JUN, LEE SUNG PYO, KWON CHANG GIL
Format: Patent
Sprache:eng ; kor
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator JANG HYUN JUN
LEE SUNG PYO
KWON CHANG GIL
description The present invention relates to a polishing slurry composition capable of stably maintaining dispersion stability and, more specifically, to a polishing slurry composition comprising: abrasive particles; a dispersant; a stabilizer; and a polishing selectivity adjusting agent, wherein the dispersant includes an aromatic organic acid containing at least one carboxyl group (-COOH). 본 발명은, 연마입자; 분산제; 안정화제; 및 연마 선택비조절제;를 포함하고, 상기 분산제는, 하나 이상의 카르복실기(-COOH)를 포함하는 방향족 유기산을 포함하는 것인, 연마용 슬러리 조성물에 관한 것이다.
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_KR20200032601A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>KR20200032601A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_KR20200032601A3</originalsourceid><addsrcrecordid>eNrjZJAJ8PfxDPbw9HNXCPYJDQqKVHD29w3wD_YM8fT342FgTUvMKU7lhdLcDMpuriHOHrqpBfnxqcUFicmpeakl8d5BRgZGBgYGxkZmBoaOxsSpAgAbqiHx</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>POLISHING SLURRY COMPOSITION</title><source>esp@cenet</source><creator>JANG HYUN JUN ; LEE SUNG PYO ; KWON CHANG GIL</creator><creatorcontrib>JANG HYUN JUN ; LEE SUNG PYO ; KWON CHANG GIL</creatorcontrib><description>The present invention relates to a polishing slurry composition capable of stably maintaining dispersion stability and, more specifically, to a polishing slurry composition comprising: abrasive particles; a dispersant; a stabilizer; and a polishing selectivity adjusting agent, wherein the dispersant includes an aromatic organic acid containing at least one carboxyl group (-COOH). 본 발명은, 연마입자; 분산제; 안정화제; 및 연마 선택비조절제;를 포함하고, 상기 분산제는, 하나 이상의 카르복실기(-COOH)를 포함하는 방향족 유기산을 포함하는 것인, 연마용 슬러리 조성물에 관한 것이다.</description><language>eng ; kor</language><subject>ADHESIVES ; BASIC ELECTRIC ELEMENTS ; CHEMISTRY ; DYES ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE ; METALLURGY ; MISCELLANEOUS APPLICATIONS OF MATERIALS ; MISCELLANEOUS COMPOSITIONS ; NATURAL RESINS ; PAINTS ; POLISHES ; POLISHING COMPOSITIONS OTHER THAN FRENCH POLISH ; SEMICONDUCTOR DEVICES ; SKI WAXES</subject><creationdate>2020</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20200326&amp;DB=EPODOC&amp;CC=KR&amp;NR=20200032601A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20200326&amp;DB=EPODOC&amp;CC=KR&amp;NR=20200032601A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>JANG HYUN JUN</creatorcontrib><creatorcontrib>LEE SUNG PYO</creatorcontrib><creatorcontrib>KWON CHANG GIL</creatorcontrib><title>POLISHING SLURRY COMPOSITION</title><description>The present invention relates to a polishing slurry composition capable of stably maintaining dispersion stability and, more specifically, to a polishing slurry composition comprising: abrasive particles; a dispersant; a stabilizer; and a polishing selectivity adjusting agent, wherein the dispersant includes an aromatic organic acid containing at least one carboxyl group (-COOH). 본 발명은, 연마입자; 분산제; 안정화제; 및 연마 선택비조절제;를 포함하고, 상기 분산제는, 하나 이상의 카르복실기(-COOH)를 포함하는 방향족 유기산을 포함하는 것인, 연마용 슬러리 조성물에 관한 것이다.</description><subject>ADHESIVES</subject><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CHEMISTRY</subject><subject>DYES</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE</subject><subject>METALLURGY</subject><subject>MISCELLANEOUS APPLICATIONS OF MATERIALS</subject><subject>MISCELLANEOUS COMPOSITIONS</subject><subject>NATURAL RESINS</subject><subject>PAINTS</subject><subject>POLISHES</subject><subject>POLISHING COMPOSITIONS OTHER THAN FRENCH POLISH</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>SKI WAXES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2020</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZJAJ8PfxDPbw9HNXCPYJDQqKVHD29w3wD_YM8fT342FgTUvMKU7lhdLcDMpuriHOHrqpBfnxqcUFicmpeakl8d5BRgZGBgYGxkZmBoaOxsSpAgAbqiHx</recordid><startdate>20200326</startdate><enddate>20200326</enddate><creator>JANG HYUN JUN</creator><creator>LEE SUNG PYO</creator><creator>KWON CHANG GIL</creator><scope>EVB</scope></search><sort><creationdate>20200326</creationdate><title>POLISHING SLURRY COMPOSITION</title><author>JANG HYUN JUN ; LEE SUNG PYO ; KWON CHANG GIL</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR20200032601A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; kor</language><creationdate>2020</creationdate><topic>ADHESIVES</topic><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CHEMISTRY</topic><topic>DYES</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE</topic><topic>METALLURGY</topic><topic>MISCELLANEOUS APPLICATIONS OF MATERIALS</topic><topic>MISCELLANEOUS COMPOSITIONS</topic><topic>NATURAL RESINS</topic><topic>PAINTS</topic><topic>POLISHES</topic><topic>POLISHING COMPOSITIONS OTHER THAN FRENCH POLISH</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>SKI WAXES</topic><toplevel>online_resources</toplevel><creatorcontrib>JANG HYUN JUN</creatorcontrib><creatorcontrib>LEE SUNG PYO</creatorcontrib><creatorcontrib>KWON CHANG GIL</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>JANG HYUN JUN</au><au>LEE SUNG PYO</au><au>KWON CHANG GIL</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>POLISHING SLURRY COMPOSITION</title><date>2020-03-26</date><risdate>2020</risdate><abstract>The present invention relates to a polishing slurry composition capable of stably maintaining dispersion stability and, more specifically, to a polishing slurry composition comprising: abrasive particles; a dispersant; a stabilizer; and a polishing selectivity adjusting agent, wherein the dispersant includes an aromatic organic acid containing at least one carboxyl group (-COOH). 본 발명은, 연마입자; 분산제; 안정화제; 및 연마 선택비조절제;를 포함하고, 상기 분산제는, 하나 이상의 카르복실기(-COOH)를 포함하는 방향족 유기산을 포함하는 것인, 연마용 슬러리 조성물에 관한 것이다.</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng ; kor
recordid cdi_epo_espacenet_KR20200032601A
source esp@cenet
subjects ADHESIVES
BASIC ELECTRIC ELEMENTS
CHEMISTRY
DYES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE
METALLURGY
MISCELLANEOUS APPLICATIONS OF MATERIALS
MISCELLANEOUS COMPOSITIONS
NATURAL RESINS
PAINTS
POLISHES
POLISHING COMPOSITIONS OTHER THAN FRENCH POLISH
SEMICONDUCTOR DEVICES
SKI WAXES
title POLISHING SLURRY COMPOSITION
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-06T12%3A50%3A39IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=JANG%20HYUN%20JUN&rft.date=2020-03-26&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EKR20200032601A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true