Electrostatic chuck unit and thin film depositing apparatus using the same

According to one embodiment of the present invention, disclosed is an electrostatic chuck unit, which has a first wiring part generating relatively weak electrostatic force and a second wiring part generating relatively strong electrostatic force on a main body. Compared to the first wiring part, th...

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Bibliographische Detailangaben
Hauptverfasser:	MOON JAE SUK, MIN SOO HYUN, KONG BYUNG IK, HONG SEUNG JU, LEE SEUNG JIN, KO JUN HYEUK, KIM EUI GYU, SONG MIN CHUL
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR METALLURGY PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	According to one embodiment of the present invention, disclosed is an electrostatic chuck unit, which has a first wiring part generating relatively weak electrostatic force and a second wiring part generating relatively strong electrostatic force on a main body. Compared to the first wiring part, the second wiring part has a denser interval between wiring. 본 발명의 일 실시예는 상대적으로 약한 정전력을 발생시키는 제1배선부와, 상대적으로 강한 정전력을 발생시키는 제2배선부를 본체에 구비한 정전척 유닛을 개시한다.