GUIDED INSPECTION OF A SEMICONDUCTOR WAFER BASED ON SYSTEMATIC DEFECTS

Candidate defects can be identified in a semiconductor wafer. It can be determined whether the candidate defects in the semiconductor wafer correspond to systematic defects or random defects. In response of determination that the candidate defects in the semiconductor wafer correspond to the systema...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SOFER YOTAM, SHABTAY SAAR, COHEN BOAZ, BUCHMAN ELI
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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