MEASURING A HEIGHT PROFILE OF A HOLE FORMED IN NON-CONDUCTIVE REGION

The present invention relates to a system for measuring a hole, a computer program product, and a method. The method can comprise: a step of charging a vicinity of a hole having a nanometer width; a step of acquiring a plurality of electronic images of the hole - each electron image is formed by sen...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHIRKO KONSTANTIN, HERSHKOVICH ORIT HAVA ARMON
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING COMPUTING COUNTING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY IMAGE DATA PROCESSING OR GENERATION, IN GENERAL MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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