A quartz window for adjusting the focus height of the uplook review camera mounted on tension mask assembly manufacture equipments and the method adjusting the focus heigh

The present invention provides a quartz window for reducing an error in the measurement of a mask hole position according to a focal height difference of an uplook review camera by matching the focal heights of the uplook review camera during correction and during the manufacture of a mask frame in...

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Bibliographische Detailangaben
Hauptverfasser: HO DONG LEE, NA SILIN, SIN SANG HOON, KIM JUNG HO, LIM IL YOUNG
Format: Patent
Sprache:eng ; kor
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Zusammenfassung:The present invention provides a quartz window for reducing an error in the measurement of a mask hole position according to a focal height difference of an uplook review camera by matching the focal heights of the uplook review camera during correction and during the manufacture of a mask frame in a manufacturing apparatus for a tension mask frame assembly on which the uplook review camera is mounted, a manufacturing apparatus for a tension mask frame assembly using the quartz window, and a method for adjusting the focal height of an uplook review camera by using the quartz window. The manufacturing apparatus for a tension mask frame assembly on which the uplook review camera is mounted corrects position coordinate values of the uplook review camera by using a correction plate, and includes the quartz window mounted on the uplook review camera to eliminate the difference between the focal positions of the uplook review camera during correction and during the manufacture of a tension mask frame that is caused by the use of the correction plate. Further, the quartz window is not mounted on the uplook review camera during correction, but is mounted on the uplook review camera only in the manufacture of the tension mask frame. The quartz window is formed as a quartz plate, and has the same thickness as a correction pattern display quartz plate of the correction plate. The present invention measures the mask hole position while matching the focal position of the uplook review camera during correction and that of the uplook review camera during the manufacture of the frame mask, and can reduce an error in the position that is generated by a z axis, thereby satisfying an error (within ± 1 um) in the measurement of the mask hole that is required by tension mask frame assembly manufacturers. 본 발명은, 업룩 리뷰카메라가 부착된 텐션마스크 프레임 어셈블리 제조장치에서, 업룩 리뷰카메라의 초점 높이를 보정시와 마스크 프레임 제작시의 초점 높이를 일치시켜 업룩 리뷰카메라의 초점 높이차에 따른 마스크 홀 위치의 측정오차를 줄이는 퀄츠 윈도우와, 상기 퀄츠 윈도우를 이용하는 텐션마스크 프레임 어셈블리 제조장치, 및 상기 퀄츠 윈도우를 이용하여 업룩 리뷰카메라의 초점 위치를 보정하는 방법을 제공하는 것이다. 본 발명은, 업룩 리뷰카메라가 부착된 텐션마스크 프레임 어셈블리 제조 장치에서 업룩 리뷰카메라의 위치 좌표값을 보정판을 이용하여 보정하되, 상기 보정판을 이용함으로써 생기는, 보정시와 텐션 마스크 프레임의 제조시의 업룩 리뷰카메라의 초점 위치의 차이를 해소하기 위해, 업룩 리뷰카메라에 장착되는 퀄츠 윈도우를 포함하는 것을 특징으로 한다. 또한, 퀄츠 윈도우는 보정시에는 업룩 리뷰카메라에 장착되지 않으며, 텐션 마스크 프레임의 제조시에만 업룩 리뷰카메라에 장착된다. 퀄츠 윈도우는, 퀄츠판으로 이루어지되, 두께가 상기 보정판의 보정패턴 표시 퀄츠판과 동일한 두께이다. 본 발명은 보정시 업룩 리뷰카메라의 초점위치와 프레임 마스크 제작시 업룩 리뷰카메라의 초점위치를 일치시켜 마스크 홀의 위치를 측정하는데 z축에 의해 발생하는 위치 오차를 줄이게 하며, 이에 따라. 텐션마스크 프레임 어셈블리 제조업계 요구수준