TEST APPARATUS FOR SEMICONDUCTOR PROCESS AND EQUIPMENT OF SEMICONDUCTOR PROCESS

An test apparatus of a semiconductor process according to an embodiment of the present invention includes a transfer device for transferring a process object between a plurality of chambers, a line camera located in the upper portion of the transfer device, photographing the process object transferr...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JUNG MYUNG HO, RYU YOUNG SU, CHOI CHANG HOON, HA JEONG SU, KIM SUNG CHAI, KIM JONG SU, SEO WON GUK
Format: Patent
Sprache:eng ; kor
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