Substrate transporting system storage medium and substrate transporting method

Embodiments of a substrate transporting system include: a substrate transporting robot; a module receiving the substrate transporting robot therein and including an EFEM door; a load port for positioning a FOUP having a FOUP door on an upper portion; and a controller for opening the EFEM door while...

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Bibliographische Detailangaben
Hauptverfasser:	SUWADA MASAEI, HAGINO TAKASHI
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	Embodiments of a substrate transporting system include: a substrate transporting robot; a module receiving the substrate transporting robot therein and including an EFEM door; a load port for positioning a FOUP having a FOUP door on an upper portion; and a controller for opening the EFEM door while the FOUP door is closed when the FOUP is positioned at a dock position of the load port. 기판 이송 시스템의 예들은, 기판 이송 로봇; 상기 기판 이송 로봇을 내부에 수용하며, EFEM 도어를 포함하는 모듈; 상부에 FOUP 도어를 갖는 FOUP을 위치시키기 위한 로드 포트; 및 상기 FOUP이 상기 로드 포트의 도크 위치에 위치될 때, 상기 FOUP 도어가 폐쇄된 상태에서 상기 EFEM 도어를 개방하기 위한 컨트롤러;를 포함한다.