VACUUM PROCESSING APPARATUS AND OPERATING METHOD OF VACUUM PROCESSING APPARATUS
The present invention provides a driving method of a vacuum processing apparatus, which improves processing yield. The driving method of a vacuum processing apparatus has: a plurality of vacuum transfer chambers connected through a middle chamber; and a plurality of vacuum processing chambers respec...
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| Format: | Patent |
| Sprache: | eng ; kor |
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| Zusammenfassung: | The present invention provides a driving method of a vacuum processing apparatus, which improves processing yield. The driving method of a vacuum processing apparatus has: a plurality of vacuum transfer chambers connected through a middle chamber; and a plurality of vacuum processing chambers respectively connected to the vacuum transfer chambers. The vacuum processing apparatus communicates with the plurality of vacuum transfer chambers through the middle chamber and is controlled by most suitable gas flow under a situation on which the apparatus is placed.
[과제] 처리의 수율을 향상시킨 진공 처리 장치의 운전 방법을 제공한다. [해결 수단] 중간실을 통해 연결된 복수의 진공 반송실과, 당해 진공 반송실에 각각 연결된 복수의 진공 처리실을 갖는 진공 처리 장치의 운전 방법에 있어서, 중간실을 통해 복수의 진공 반송실을 연통(連通)시키고, 장치가 놓인 상황 하에 있어서 가장 호적(好適)한 가스 흐름으로 제어되는 것이 가능한 진공 처리 장치를 제공한다. |
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