$A method for automatically aligning a scanning transmission electron microscope for precession electron diffraction data mapping$

A method for automatically aligning a scanning transmission electron microscope for precession electron diffraction data mapping

The present invention relates to a method for automatically aligning scanning transmission electron microscope (STEM) for obtaining precession electron diffraction (PED) mapping data with high spatial resolving power. The method comprises the steps of: generating an incident electron beam; and obtai...

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Bibliographische Detailangaben
Hauptverfasser:	BOHUMILA LENCOVA, JON KARL WEISS, STANISLAV PETRAS, GERD LUDWIG BENNER
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	The present invention relates to a method for automatically aligning scanning transmission electron microscope (STEM) for obtaining precession electron diffraction (PED) mapping data with high spatial resolving power. The method comprises the steps of: generating an incident electron beam; and obtaining non-inclined signal spatial distribution from a sample area. 본 발명은 세차 전자 회절(precession electron diffraction; PED) 매핑 데이터를 높은 공간 분해능으로 획득하기 위한 주사형 투과 전자 현미경(scanning transmission electron microscope; STEM) 자동 정렬 방법에 관한 것이다.