A VACCUM CHUCK FOR WAFER

The present invention relates to a vacuum chuck for a wafer. More specifically, the vacuum chuck for a wafer includes: a base table located on a dicing facility including a control part and a dicing unit, and including a vacuum flow path connected to a vacuum source; a porous part on which a wafer i...

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Bibliographische Detailangaben
Hauptverfasser:	YOOK IN SOO, YOO SUNG WOONG, LEE DONG HEON, KIM CHANG SOO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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