SUBSTRATE CUTTING DEVICE
According to the present invention, a substrate cutting device comprises: a base part; a stage disposed on the base part, including a top surface and a connection surface perpendicular to the top surface, and having a cell substrate disposed on the top surface; a partition member spaced apart from t...
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Format: | Patent |
Sprache: | eng ; kor |
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Zusammenfassung: | According to the present invention, a substrate cutting device comprises: a base part; a stage disposed on the base part, including a top surface and a connection surface perpendicular to the top surface, and having a cell substrate disposed on the top surface; a partition member spaced apart from the stage so as to face the connection surface, and supporting the cell substrate; and a discharge part disposed on a bottom side of the cell substrate and discharging gas. Therefore, the present invention provides the substrate cutting device which is capable of effectively removing impurities generated during substrate cutting.
본 발명의 기판 절단 장치에 따르면, 베이스 부, 상기 베이스 부 상에 배치되고, 상면 및 상기 상면과 수직을 이루는 연결면을 포함하며, 상기 상면에 셀 기판이 배치되는 스테이지, 상기 스테이지와 이격되어 상기 연결면과 마주하도록 배치되며 상기 셀 기판을 지지하는 격벽 부재, 상기 셀 기판의 하 측에 배치되고, 기체를 배출하는 배출부를 포함한다. |
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