SUPERSTRATE AND A METHOD OF USING THE SAME

A body of a superstrate can be used to form an adaptive planarization layer over a substrate that has a non-uniform topography. The body of a superstrate can have bending characteristics that are very suitable to achieve both conformal and planarization behaviors. The body can have the surface and t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KHUSNATDINOV NIYAZ, LABRAKE DWAYNE L
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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