COMPOSITION FOR FORMING INSULATION LAYER AND INSULATION LAYER FORMED FROM THE SAME

Embodiments of the present invention provides a composition which comprises a silica sol, a porogen, and a thermal acid generator, and is able to form an insulation layer having a low dielectric constant and high elastic properties. The silica sol can be formed from a silane compound comprising a te...

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Hauptverfasser: YANG DON SIK, CHOI HAN YOUNG, KUM JOONG HAN
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creator YANG DON SIK
CHOI HAN YOUNG
KUM JOONG HAN
description Embodiments of the present invention provides a composition which comprises a silica sol, a porogen, and a thermal acid generator, and is able to form an insulation layer having a low dielectric constant and high elastic properties. The silica sol can be formed from a silane compound comprising a tertiary silane compound and a cyclic siloxane structure. 본 발명의 실시예들은 실리카 졸, 포로젠(porogen), 및 열산 발생제를 포함하며, 저유전율, 고탄성 특성을 갖는 절연막을 형성할 수 있는 조성물을 제공한다.
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subjects BASIC ELECTRIC ELEMENTS
CABLES
CONDUCTORS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INSULATORS
SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES
SEMICONDUCTOR DEVICES
title COMPOSITION FOR FORMING INSULATION LAYER AND INSULATION LAYER FORMED FROM THE SAME
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