Carrier vehicle and micro particle monitoring system using the same

According to the present invention, a transfer vehicle includes: a moving unit moving in a clean room and transferring an object to a target position; a fine particle probe part into which air containing a fine particle in the clean room is introduced; a sensor part connected to the fine particle pr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SEUNG JAE IK, SONG SA HEON, HA YOON HO, KIM DONG WON
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BODY DETAILS OR KINDS OF RAILWAY VEHICLES ENSURING THE SAFETY OF RAILWAY TRAFFIC GUIDING RAILWAY TRAFFIC INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PERFORMING OPERATIONS PHYSICS RAILWAYS TESTING TRANSPORTING
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