Linear evaporation source

Disclosed is a linear evaporation source for high temperature. According to an embodiment of the present invention, the linear evaporation source for high temperature comprises: a block housing configured to form an appearance of equipment, and having a lower cooling block; a crucible disposed in th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KIM YOUNG DO, KANG JIN GEON
Format: Patent
Sprache:eng ; kor
Schlagworte:
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