Linear evaporation source

Disclosed is a linear evaporation source for high temperature. According to an embodiment of the present invention, the linear evaporation source for high temperature comprises: a block housing configured to form an appearance of equipment, and having a lower cooling block; a crucible disposed in th...

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Bibliographische Detailangaben
Hauptverfasser:	KIM YOUNG DO, KANG JIN GEON
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BLASTING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL FURNACES FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL HEATING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL KILNS LIGHTING MECHANICAL ENGINEERING METALLURGY OPEN SINTERING OR LIKE APPARATUS OVENS RETORTS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION WEAPONS
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Beschreibung
Zusammenfassung:	Disclosed is a linear evaporation source for high temperature. According to an embodiment of the present invention, the linear evaporation source for high temperature comprises: a block housing configured to form an appearance of equipment, and having a lower cooling block; a crucible disposed in the block housing and filled with an evaporation material; and a crucible lower support unit disposed on the lower cooling block in the block housing and supporting an area of a lower portion of the crucible in a corresponding position. 고온용 선형 증착원이 개시된다. 본 발명의 일 실시예에 따른 고온용 선형 증착원은, 장비의 외관을 형성하되 하부 쿨링 블록(cooling block)을 구비하는 블록 하우징(block housing); 블록 하우징 내에 배치되며, 증착물질이 내부에 충전되는 크루시블(crucible); 및 블록 하우징 내에서 하부 쿨링 블록 상에 배치되며, 해당 위치에서 크루시블의 하부 일 영역을 받쳐 지지하는 크루시블 하부 받침유닛을 포함한다.