A POLISHING PAD HAVING INTERNAL CHANNEL AND A METHOD OF PREPARING THE SAME

Provided are a polishing pad including an internal channel and a manufacturing method thereof. The internal channel penetrates the polishing pad, and an opening part of the internal channel is located on a polishing surface of the polishing pad. Therefore, the present invention is capable of reducin...

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Hauptverfasser: LEE TAE WOO, KIM PAL KON
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KIM PAL KON
description Provided are a polishing pad including an internal channel and a manufacturing method thereof. The internal channel penetrates the polishing pad, and an opening part of the internal channel is located on a polishing surface of the polishing pad. Therefore, the present invention is capable of reducing the amount of polishing liquid such as slurry wasted during a polishing process. 내부 채널을 포함하는, 연마 패드로서, 상기 내부 채널은 상기 연마 패드를 관통하는 것이고, 상기 내부 채널의 개구부는 상기 연마 패드의 연마 면에 위치되는 것인, 연마 패드, 및 이의 제조 방법을 제공한다.
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subjects BASIC ELECTRIC ELEMENTS
DRESSING OR CONDITIONING OF ABRADING SURFACES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
PERFORMING OPERATIONS
POLISHING
SEMICONDUCTOR DEVICES
TRANSPORTING
title A POLISHING PAD HAVING INTERNAL CHANNEL AND A METHOD OF PREPARING THE SAME
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