VAPORIZATION DEVICE FOR PARYLENE DEPOSITION APPARATUS ENABLE TO CONTROL DISCHARE OF VAPORIZED PARYLENE METHOD FOR OPERATING THE SAME AND PARYLENE DEPOSITION APPARATUS HAVING THE SAME

The present invention relates to a vaporizer for parylene deposition equipment capable of controlling discharge of gas phase parylene dimer, an operation method thereof, and parylene deposition equipment having the same. The vaporizer for parylene deposition equipment capable of controlling discharg...

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Bibliographische Detailangaben
Hauptverfasser:	GWON HYUK LYONG, HEO JAE SEOK, LEE JEONG RAE, LEE SEOK WOON
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The present invention relates to a vaporizer for parylene deposition equipment capable of controlling discharge of gas phase parylene dimer, an operation method thereof, and parylene deposition equipment having the same. The vaporizer for parylene deposition equipment capable of controlling discharge of gas phase parylene dimer comprises: a container in which parylene dimer powder is stored; a discharge pipe connected to the container; a discharge control unit installed in the discharge pipe and controlling discharge of the gas phase parylene dimer generated from the parylene dimer powder in the container; and a heat insulation unit covering the discharge pipe and the discharge control unit and keeping temperature of the discharge pipe and the discharge control unit higher than vaporization temperature of the parylene dimer powder. 본 발명은, 파릴렌 다이머 분말을 수용하는 용기; 상기 용기에 연결된 배출 배관; 상기 배출 배관에 설치되어, 상기 용기에서 상기 파릴렌 다이머 분말로부터 생성된 기체상 파릴렌 다이머의 배출을 조정하는 배출조정 유닛; 및 상기 배출 배관 및 상기 배출조정 유닛을 감싸서 상기 배출 배관 및 상기 배출조정 유닛의 온도를 상기 파릴렌 다이머 분말의 기화 온도보다 높은 온도로 유지하는 보온 유닛을 포함하는, 기체상 파릴렌 다이머 배출 조절 가능한 파릴렌 증착 장비용 기화기 및 그의 운용 방법, 그리고 그를 구비하는 파릴렌 증착 장비를 제공한다.