DROPLET DISCHARGING APPARATUS DROPLET DISCHARGING METHOD PROGRAM AND COMPUTER STORAGE MEDIUM

An object of the present invention is to suppress drying of droplets inspected and discharged onto an inspection medium and appropriately perform droplet inspection. A droplet discharging apparatus, discharging and drawing a droplet (D) of functional liquid onto a work, has: a droplet discharging he...

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Bibliographische Detailangaben
Hauptverfasser:	MATSUMOTO MAKOTO, OSHIMA KIYOMI, TOHARA ATSUSHI, HAYASHI TERUYUKI, NAKAGOMI HIROSHI, KONTA YUU
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	An object of the present invention is to suppress drying of droplets inspected and discharged onto an inspection medium and appropriately perform droplet inspection. A droplet discharging apparatus, discharging and drawing a droplet (D) of functional liquid onto a work, has: a droplet discharging head discharging the droplet (D) onto the work; a medium (51) as an inspection medium which receives inspection discharge from the droplet discharging head; a cover body (34) having a cover (32) as an inspection cover covering the droplet (D) inspected and discharged to the medium (51); and a camera (31) as an photographing unit for photographing the droplet (D) inspected and discharged to the medium (51) through the cover (32). 본 발명은 검사용 매체에 검사 토출된 액적의 건조를 억제하여, 액적 검사를 적절히 행하는 것을 목적으로 한다. 워크에 기능액의 액적(D)을 토출하여 묘화하는 액적 토출 장치는, 워크에 액적(D)을 토출하는 액적 토출 헤드와, 액적 토출 헤드로부터의 검사 토출을 받는 검사용 매체로서의 미디어(51)와, 미디어(51)에 검사 토출된 액적(D)을 덮는 검사용 커버로서의 커버(32)를 구비한 커버체(34)와, 커버(32)를 통해 미디어(51)에 검사 토출된 액적(D)을 촬상하는 촬상부로서의 카메라(31)를 갖는다.