Method for inspecting a semiconductor substrate and method for manufacturing a semiconductor device

Method for inspecting a semiconductor substrate and method for manufacturing a semiconductor device

A method for inspecting a semiconductor substrate according to some embodiments comprises: a step of measuring the amount of light reflected on a rotating semiconductor substrate; a step of analyzing a frequency distribution of the measured amount of light; and a step of determining the state of the...

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Hauptverfasser: CHOI YOUNG UK, LEE CHANG YUN, KIM DO HYUNG, KIM YEON TAE, CHOI EUN SOK, PARK KEE SOO, YANG KWANG HYUN
Format: Patent
Sprache:eng ; kor
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator CHOI YOUNG UK
LEE CHANG YUN
KIM DO HYUNG
KIM YEON TAE
CHOI EUN SOK
PARK KEE SOO
YANG KWANG HYUN
description A method for inspecting a semiconductor substrate according to some embodiments comprises: a step of measuring the amount of light reflected on a rotating semiconductor substrate; a step of analyzing a frequency distribution of the measured amount of light; and a step of determining the state of the semiconductor substrate using the frequency distribution. The step of analyzing the frequency distribution of the measured amount of light includes a process of extracting a plurality of frequency components corresponding to a plurality of frequencies, respectively. 일부 실시예들에 따른 반도체 기판을 검사하는 방법은 회전하는 반도체 기판에 반사된 광량을 측정하는 단계, 측정된 상기 광량의 주파수 분포를 분석하는 단계, 및 상기 주파수 분포를 이용하여 상기 반도체 기판의 상태를 결정하는 단계를 포함하고, 상기 측정된 상기 광량의 주파수 분포를 분석하는 단계는 복수개의 주파수에 각각 대응하는 복수개의 주파수 성분들을 추출하는 것을 포함한다.
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ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Method for inspecting a semiconductor substrate and method for manufacturing a semiconductor device
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