DICINGDIE BONDING SHEET

Provided is a dicing and die bonding sheet having an adhesive layer capable of suppressing shrinkage of an adhesive layer caused by deformation of a substrate during a dicing process. According to the dicing and die bonding sheet, in which the adhesive layer is laminated on the substrate, of the pre...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: NEZU YUSUKE, KARASAWA YASUNORI
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:Provided is a dicing and die bonding sheet having an adhesive layer capable of suppressing shrinkage of an adhesive layer caused by deformation of a substrate during a dicing process. According to the dicing and die bonding sheet, in which the adhesive layer is laminated on the substrate, of the present invention, the adhesive layer in a state before stiffening has a storage modulus of 50,000 to 5,000,000 Pa at 80°C, and has a stress relaxation rate of 30 to 90 % after 120 seconds of applying torsion stress of 20% in an environment of 80°C. 다이싱 공정 시에 있어서의 기재의 변형에 동반하는 접착제층의 수축을 억제할 수 있는 접착제층을 갖는 다이싱ㆍ다이 본딩 시트를 제공하는 것. 본 발명에 관련되는 다이싱ㆍ다이 본딩 시트는 기재 상에 접착제층이 적층된 다이싱ㆍ다이 본딩 시트로서, 상기 접착제층은 경화 전의 상태에 있어서, 80℃에 있어서의 저장 탄성률이 50000∼5000000Pa이고, 또한, 80℃ 환경 하의 20% 비틀림 응력 부가의 120초 후에 있어서의 응력 완화율이 30∼90%이다.