Chip ejecting apparatus and chip bonding equipment including the same

According to an embodiment of the present invention, a chip ejecting apparatus includes: a plurality of ejecting pins; a pressure measuring unit provided on a lower portion of the plurality of ejecting pins and measuring and outputting pressure values applied to the plurality of ejecting pins; and a...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KANG, BYUNG CHUL, KWON, YOUNG GEON, LEE, GYU JEI
Format: Patent
Sprache:eng ; kor
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:According to an embodiment of the present invention, a chip ejecting apparatus includes: a plurality of ejecting pins; a pressure measuring unit provided on a lower portion of the plurality of ejecting pins and measuring and outputting pressure values applied to the plurality of ejecting pins; and a controller calculating an average value of the pressure values outputted from the pressure measuring unit, comparing a predetermined critical pressure value with the average value, and lifting and lowering the plurality of ejecting pins based on a difference between the average value and the critical pressure value. 본 발명의 실시 예에 의한 칩 이젝팅 장치는 복수의 이젝팅 핀들; 상기 복수의 이젝팅 핀들의 하부에 배치되고, 상기 복수의 이젝팅 핀들에 가해지는 압력 값들을 측정하여 출력하는 압력 측정부; 상기 압력 측정부로부터 출력되는 상기 압력 값들의 평균 값을 연산하고, 상기 평균 값과 기 설정된 임계 압력 값을 비교하고, 상기 평균 값과 상기 임계 압력 값의 차이에 근거하여 상기 복수의 이젝팅 핀들을 상승 또는 하강시키도록 구성된 컨트롤러를 포함할 수 있다.