Lift pin unit and Unit for supporting substrate
Disclosed is a substrate support unit. According to one embodiment of the present invention, the substrate support unit includes: a susceptor supporting a substrate and having a pin hole in upper and lower directions; a lift pin provided to be lifted along the pin hole; a support shaft supporting th...
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| Format: | Patent |
| Sprache: | eng ; kor |
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| Zusammenfassung: | Disclosed is a substrate support unit. According to one embodiment of the present invention, the substrate support unit includes: a susceptor supporting a substrate and having a pin hole in upper and lower directions; a lift pin provided to be lifted along the pin hole; a support shaft supporting the lift pin; and a driving unit moving the support shaft in upper and lower directions, wherein the lift pin has a first magnetic substance at an lower end and the support shaft has a second magnetic substance having an opposite polarity to the first magnetic substance at an upper end thereof.
기판 지지 유닛이 개시된다. 본 발명의 일실시예에 따른 기판 지지 유닛은 기판을 지지하고, 상하방향으로 핀홀이 형성된 서셉터; 상기 핀홀을 따라 승강하도록 제공되는 리프트 핀; 상기 리프트 핀을 지지하는 지지축; 상기 지지축을 상하 방향으로 이동시키는 구동부를 포함하되, 상기 리프트 핀은 그 하단에 제1자성체를 가지고, 상기 지지축은 그 상단에 상기 제1자성체와 반대 극성의 제2자성체를 갖는다. |
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