Electrostatic Chuck Structure and Method of Manufacturing The Same
The present invention relates to a structure and a method of manufacturing the same. According to an embodiment of the present invention, the method of manufacturing the structure comprises: providing a substrate having a first surface and a second surface; forming a channel unit in a predetermined...
Gespeichert in:
| Hauptverfasser: | , , |
|---|---|
| Format: | Patent |
| Sprache: | eng ; kor |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | The present invention relates to a structure and a method of manufacturing the same. According to an embodiment of the present invention, the method of manufacturing the structure comprises: providing a substrate having a first surface and a second surface; forming a channel unit in a predetermined portion of the first surface of the substrate; and forming a protective film on the first surface of the substrate provided with the channel unit.
구조체 및 그것의 제조방법에 관한 것이다. 본 발명의 일 실시예에 따른 구조체의 제조방법은 다음과 같다. 먼저, 제 1 표면 및 제 2 표면을 갖는 기판을 제공한다. 상기 기판의 제 1 표면의 소정 부분에 채널부를 형성한다. 상기 채널부가 구비된 상기 기판의 제 1 표면에 보호막을 형성한다. |
|---|