CONCENTRATION CONTROL DEVICE FOR DEVELOPING SOLUTION AND SUBSTRATE DEVELOPING SYSTEM

The objective of the present invention is to provide a developer concentration management device which is optimal for managing a developer used for developing a substrate in an optimal condition; and a substrate developing system. To achieve the purpose, a substrate processing system includes: the d...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	NAKAGAWA TOSHIMOTO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!